JPH0343728U - - Google Patents

Info

Publication number
JPH0343728U
JPH0343728U JP10548889U JP10548889U JPH0343728U JP H0343728 U JPH0343728 U JP H0343728U JP 10548889 U JP10548889 U JP 10548889U JP 10548889 U JP10548889 U JP 10548889U JP H0343728 U JPH0343728 U JP H0343728U
Authority
JP
Japan
Prior art keywords
spinner
wafer
cover
rotates
corresponds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10548889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10548889U priority Critical patent/JPH0343728U/ja
Publication of JPH0343728U publication Critical patent/JPH0343728U/ja
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)
JP10548889U 1989-09-08 1989-09-08 Pending JPH0343728U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10548889U JPH0343728U (en]) 1989-09-08 1989-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10548889U JPH0343728U (en]) 1989-09-08 1989-09-08

Publications (1)

Publication Number Publication Date
JPH0343728U true JPH0343728U (en]) 1991-04-24

Family

ID=31654249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10548889U Pending JPH0343728U (en]) 1989-09-08 1989-09-08

Country Status (1)

Country Link
JP (1) JPH0343728U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018026477A (ja) * 2016-08-10 2018-02-15 東京エレクトロン株式会社 液処理装置及び液処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018026477A (ja) * 2016-08-10 2018-02-15 東京エレクトロン株式会社 液処理装置及び液処理方法

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